In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 35, No. 3A ( 1996-03-01), p. L338-
Abstract:
Ion and neutral temperatures are measured in an ultrahigh-frequency discharge plasma through Ar and Ne by Doppler-shifted laser-induced fluorescence. The ion and neutral temperatures are estimated to be ≈0.066 eV (770 K) for Ar + and 0.033±0.004 eV ( 380 ±50 K) for Ne, respectively. These temperatures are lower than those reported for electron cyclotron resonance and helicon wave plasmas. The low temperatures are attributed to the low electron temperature ( ≈2 eV) and excellent uniformity of the UHF plasma.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.35.L338
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1996
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7