In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 36, No. 7S ( 1997-07-01), p. 4558-
Kurzfassung:
Electron heating in inductively coupled plasma with use of a planar, spiral antenna is investigated by measurement of the skin depth of evanescent waves and antenna-plasma coupling. It is shown that for plasma production, both a collisionless and a collisional heating mechanism play an important role in a wide range of collision frequencies. In addition, control of plasma parameters such as uniformity and density by adjustment of the antenna configuration and the external magnetic field is demonstrated.
Materialart:
Online-Ressource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.36.4558
Sprache:
Unbekannt
Verlag:
IOP Publishing
Publikationsdatum:
1997
ZDB Id:
218223-3
ZDB Id:
797294-5
ZDB Id:
2006801-3
ZDB Id:
797295-7