In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 36, No. 7S ( 1997-07-01), p. 4597-
Abstract:
Ultrahigh-frequency (UHF) discharge plasma, as well as electron cyclotron resonance (ECR) plasma and inductively coupled plasma (ICP), is diagnosed in a series of measurements of metastable ion (Ar + , Cl + ) and neutral (Ne) temperatures by Doppler-shifted laser-induced fluorescence. Cl + temperature is found to be lower in UHF plasma and ICP than in ECR plasma. In UHF plasma, the ion temperature weakly depends on both pressure and power, suggesting that plasma uniformity is insensitive to these external parameters. Magnetic multipole confinement enables the production of a stable UHF plasma even at pressures below 0.13 Pa where the plasma cannot be produced without the confinement. In this pressure region, Cl + temperature is decreased to ≈0.1 eV.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.36.4597
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1997
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
