In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 36, No. 7S ( 1997-07-01), p. 4601-
Abstract:
The electron energy distribution function (EEDF) of an asymmetric parallel plate radio-frequency discharge has been measured with a modified self-compensating Langmuir probe. The measurements are taken for argon gas discharges at pressures between 50 mTorr and 0.4 Torr. The applied discharge powers are between 5 W and 50 W. It is found that at low pressures the EEDF consists of two electron energy groups. The spatial dependence of plasma parameters is also investigated.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.36.4601
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1997
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7