In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 36, No. 7S ( 1997-07-01), p. 4648-
Abstract:
Signal intensities of positive ions were measured in situ by direct sampling from parallel-plate discharges in CF 4 /Ar and CF 4 /O 2 mixtures using a quadrupole mass spectrometer. Major positive ions in CF 4 /Ar discharge are CF x + ( x =3, 2, 1) and Ar + . Some of the production of CF 2 + and CF + is considered to be due to the contribution of Ar + . Major positive ions in CF 4 /O 2 discharge are CF 3 + , O y + and F y + ( y =2, 1). The signal intensity of CO 2 + is of the same order as that of F y + . The signal intensities of F y + and O + in CF 4 /O 2 discharge are higher than those in pure CF 4 and O 2 discharges, respectively. Intensity ratios of the ions vary with the gas mixing ratios.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.36.4648
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1997
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
