In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 36, No. 7S ( 1997-07-01), p. 4695-
Abstract:
In this review paper, general wave characteristics and plasma production through excitation by propagating waves are outlined, with emphasis on plasma processing. First, the basic wave classification, characteristics and wave phenomena are summarized, with descriptions of resonance (damping), cutoff, polarization, wave energy and energy flux after introduction of a dispersion relation. Next, an analysis of various propagating waves and methods of plasma production and/or heating by these waves are presented followed by a summary of typical wave diagnostics. Finally, after a description of the characteristics of propagating waves and current research in the plasma processing field, i.e., with a focus on electron cyclotron, surface and helicon waves, experimental helicon wave studies are described for the introduction of typical propagating wave measurements.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.36.4695
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1997
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
