In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 36, No. 2R ( 1997-02-01), p. 847-
Abstract:
Ionic species in 13.56 MHz discharge of SF 6 /N 2 and SF 6 /Ar mixtures were measured by means of direct sampling using a quadrupole mass spectrometer. Dominant negative ions in the SF 6 /N 2 discharge are F - , SF 5 - and SF 6 - , while the positive ions are SF 3 + , SF 5 + and N 2 + . In the SF 6 /Ar discharge the major ions are the same as in the SF 6 /N 2 discharge except that N 2 + is replaced by Ar + . The signal intensity ratios of these ionic species depend on the ratio of N 2 or Ar to SF 6 in the discharge. In particular, the ratio of Ar to SF 6 in the SF 6 /Ar discharge increases, the signal intensity ratio of SF 3 + to SF 5 + shows a concave variation, and the total intensity of negative ions decreases rapidly in the SF 6 /Ar discharge. These results in the SF 6 /Ar discharge are different from the variations in the SF 6 /N 2 discharge, and seem to be based on the effects of the metastable atom Ar * on both production of SF 3 + and extinction of negative ions.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1997
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
