In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 37, No. 5R ( 1998-05-01), p. 2728-
Abstract:
For wavelengths in the spectral range of 30 to 300 Å,
the structures of multilayer (ML) soft X-ray reflectors for maximum reflectivity at normal incidence were optimized. A dynamical theory
of X-ray scattering was employed in the calculation for ideal ML structures. The calculation indicates that the optimization should be performed for a sufficiently large number
of bilayers. The structural parameters optimized for a small number of bilayers do not yield the best
performance. It is also observed that for a given number of bilayers, there exists a range of structural parameters for equivalent performance. In the spectral
region considered, the maximum reflectivities vary from 40 to 78% with respect to wavelength.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.37.2728
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1998
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7