In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 37, No. 12S ( 1998-12-01), p. 7120-
Abstract:
The spatial filter of a Si micromachined pinhole integrated with photodiodes is fabricated.
The photodiode cells placed around the center pinhole can detect the relative position between the incident beam spot and the pinhole. The automatic alignment of the pinhole was realized using a feedback control based on the position signal obtained from the photodiode cells.
In our previous study, the alignment accuracy achieved was ±0.5 µm for a pinhole of 50 µm diameter. In this study, the design is improved by reducing the separation length between the surrounding photodiode cells.
An alignment accuracy of ±0.03 µm was demonstrated.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.37.7120
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1998
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7