In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 38, No. 12S ( 1999-12-01), p. 7190-
Abstract:
The automatic alignment of a pinhole is realized in two dimensions and its function as a spatial filter is confirmed.
A pinhole device surrounded by four photodiode cells fabricated by Si micromachining techniques is placed on a movable x y stage which consists of four shape-memory-alloy actuators.
The feedback control based on the signal obtained from the integrated photodiode is confirmed to be feasible for aligning a pinhole in two dimensions even if the shape-memory-alloy actuators are disadvantageous for controlling its displacement including cross-interaction. The spatial filtering function of an automatically aligned pinhole is confirmed.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.38.7190
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1999
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7