In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 38, No. 2A ( 1999-02-01), p. L148-
Kurzfassung:
The role of electron thermal motion in radio-frequency (RF) plasma produced by a planar, spiral antenna was examined. The measured evanescent wave amplitude and the phase were compared to the calculated results obtained from a one-dimensional collisionless (nonlocal) model, changing the boundary condition, Ar filling pressure and RF frequency. It was demonstrated that electron thermal motion plays a more important role under the condition of low collisionality.
Materialart:
Online-Ressource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.38.L148
Sprache:
Unbekannt
Verlag:
IOP Publishing
Publikationsdatum:
1999
ZDB Id:
218223-3
ZDB Id:
797294-5
ZDB Id:
2006801-3
ZDB Id:
797295-7