In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 38, No. 5B ( 1999-05-01), p. L593-
Abstract:
We have newly invented a micromechanism for precise position
control, which is equivalent to that of an electrical digital-to-analog converter(DAC) of the R-2R resistor network.
The micromechanical C-2C compliance suspension network has been fabricated on a silicon-on-insulator wafer by a micromachining
technique. When N -bit digital driving voltages are applied to
the micromechanism, cascaded electrostatic microactuators produce a set of displacements of ±1 µm. These displacements
accumulate in the suspension network with binary weights to synthesize DAC-like displacement output. A traveling displacement
of 6 µm is obtained while the positioning resolution is 0.38 µm in the case of 4 bit input. Resolution can be
improved further by increasing the addressing size of the input.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.38.L593
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1999
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7