In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 39, No. 12S ( 2000-12-01), p. 6980-
Abstract:
Relative densities of chlorine molecular ions Cl 2 + and metastable chlorine atomic ions Cl +* were measured by a laser-induced fluorescence technique in cw and time-modulated inductively coupled chlorine plasma. In the discharge-off period of the time-modulated plasma, a considerable amount of Cl 2 + persisted. Under the modulation frequency of 100 kHz, the decrease of the Cl 2 + density in the discharge-off period was less than 30% and the decay time constant of Cl 2 + density was longer than that of Cl +* . In order to investigate the dominance between Cl 2 + and chlorine atomic ions Cl + , the relative densities of Cl 2 + and Cl +* were calibrated
as absolute densities along with the Langmuir probe measurements. The dominant ions in the cw plasma were Cl + , however, the Cl 2 + density became comparable to the Cl + density in the time-modulated plasma.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.39.6980
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
2000
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7