In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 39, No. 12S ( 2000-12-01), p. 7067-
Abstract:
Nanolithography of polysilane films is performed by means of a tapping-mode-scanning probe microscope (SPM) equipped with a carbon nanotube tip. The tapping mode enables us to perform finer lithography than that by the contact mode. Electrons injected from the tip directly groove the polysilane film. A constant current operation is more stable in the tapping-mode lithography than a constant bias voltage operation. The mechanism of direct lithography is discussed on the basis of the model that the excess electrons in the Si backbone break Si-Si bonds.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.39.7067
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
2000
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
