In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 39, No. 12B ( 2000-12-01), p. L1330-
Abstract:
The decomposition of N 2 O into N 2 , O 2 , and NO was studied in a fast discharge flow of N 2 O/He or N 2 O/Ar mixtures. The decomposition efficiency of N 2 O into N 2 and O 2 in N 2 O/Ar mixtures was higher than that in N 2 O/He mixtures, and 99% of N 2 O could be decomposed into N 2 and O 2 at a low N 2 O flow rate of 25 sccm. The decomposition mechanism in the discharge flow is discussed on the basis of mass spectroscopic and optical emission spectroscopic data.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.39.L1330
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
2000
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
