In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 39, No. 6A ( 2000-06-01), p. L548-
Kurzfassung:
It is found that a properly tuned segmented coil system allows
external control of the radial plasma density profile in an inside-type, large-area inductively coupled plasma. This coil
system is composed of inner and outer coil segments and an external variable inductor. The external variable inductor is used
to balance coil currents between the two coil segments for plasma uniformity control. The measured results indicate that
radial plasma spread can be controlled and optimized with this external variable inductor.
Materialart:
Online-Ressource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.39.L548
Sprache:
Unbekannt
Verlag:
IOP Publishing
Publikationsdatum:
2000
ZDB Id:
218223-3
ZDB Id:
797294-5
ZDB Id:
2006801-3
ZDB Id:
797295-7
