In:
The Abstracts of ATEM : International Conference on Advanced Technology in Experimental Mechanics : Asian Conference on Experimental Mechanics, Japan Society of Mechanical Engineers, Vol. 2007.6, No. 0 ( 2007), p. _P-37-1_-_P-37-4_
Type of Medium:
Online Resource
ISSN:
2424-2837
Uniform Title:
P-37 A study of adhesion force characteristics using rhombus-shaped AFM probe for nano-imprint lithography
DOI:
10.1299/jsmeatem.2007.6._P-37-1_
Language:
English
,
Japanese
Publisher:
Japan Society of Mechanical Engineers
Publication Date:
2007