In:
The Proceedings of The Manufacturing & Machine Tool Conference, Japan Society of Mechanical Engineers, Vol. 2001.3, No. 0 ( 2001), p. 225-226
Type of Medium:
Online Resource
ISSN:
2424-3094
Uniform Title:
317 マイクロ機械加工法とフォトリソグラフィを組み合わせた微細構造創成の試み(OS6 マイクロ加工(2))
DOI:
10.1299/jsmemmt.2001.3.225
Language:
English
,
Japanese
Publisher:
Japan Society of Mechanical Engineers
Publication Date:
2001