In:
Optics Express, Optica Publishing Group, Vol. 30, No. 3 ( 2022-01-31), p. 3665-
Kurzfassung:
In this paper, an all-sapphire fiber-optic Fabry-Perot (F-P) pressure sensor is proposed. The sapphire pressure-sensitive diaphragm with low surface roughness is fabricated by MEMS wet etching. The direct bonding process is adopted to bond the sapphire-sensitive diaphragm and substrate together. And the sapphire fiber is adopted to be the lead-in fiber to ensure the sensor’s resistance to high temperature. The performance of the sensor is tested within a pressure range of 0.1 ∼ 5 MPa and within the temperature range from room temperature to 1200°C. Experimental results show that the sensor could work stably at the temperature of 1200°C. The pressure sensitivity reaches up to 15nm/MPa. The nonlinearity of the sensor is 0.96% FS (full scale), and the relative resolution reaches 0.12%FS. The all-sapphire F-P sensor could be used for high-pressure testing in a high-temperature environment.
Materialart:
Online-Ressource
ISSN:
1094-4087
Sprache:
Englisch
Verlag:
Optica Publishing Group
Publikationsdatum:
2022
ZDB Id:
1491859-6
