In:
Optics Express, Optica Publishing Group, Vol. 31, No. 17 ( 2023-08-14), p. 28541-
Kurzfassung:
Developing durable antireflection (AR) coatings with sapphire-like hardness and high transparency faces a significant challenge. Conventionally, achieving these requirements involves depositing thick, high-hardness nitride films. Here, we proposed an alternative approach that combines nanolaminate materials with optical design, overcoming the brittleness of thick nitride films. We selected Ta 2 O 5 /Si 3 N 4 nanolaminates with similar refractive indices, improving tribological and optical performance through a unique optomechanical method. Our proposed AR coating exhibited a low reflectance of 0.8% (420-780 nm) and remarkable hardness of 22.8 GPa, and demonstrated the ability to withstand abrasion from steel wool up to 3,000 times on a glass substrate. This work successfully achieves a balance between hardness and toughness, opening new avenues for the development of highly durable coatings.
Materialart:
Online-Ressource
ISSN:
1094-4087
Sprache:
Englisch
Verlag:
Optica Publishing Group
Publikationsdatum:
2023
ZDB Id:
1491859-6
