In:
Journal of Materials Research, Springer Science and Business Media LLC, Vol. 15, No. 2 ( 2000-02), p. 554-559
Abstract:
The effect of 1000 °C vacuum annealing on the structure and hardness of epitaxial Mo/NbN superlattice thin films was studied. The intensity of superlattice satellite peaks, measured by x-ray diffraction, decreased during annealing while new peaks corresponding to a MoNbN ternary phase appeared. The results are consistent with the Mo–Nb–N phase diagram, which shows no mutual solubility between Mo, NbN, and MoNbN. Even after 3-h anneals and a loss of most of the superlattice peak intensity, the room-temperature hardness was the same as for as-deposited superlattices. The retained hardness suggests that a residual nanocomposite structure is retained even after the formation of the ternary structure.
Type of Medium:
Online Resource
ISSN:
0884-2914
,
2044-5326
DOI:
10.1557/JMR.2000.0082
Language:
English
Publisher:
Springer Science and Business Media LLC
Publication Date:
2000
detail.hit.zdb_id:
54876-5
detail.hit.zdb_id:
2015297-8