In:
MRS Proceedings, Springer Science and Business Media LLC, Vol. 297 ( 1993-01-01)
Abstract:
A quadripole mass spectrometer was installed on the line of a PCVD system to measure the depletion fraction of silane and the monosilicon radicals in the discharges. The paper presents a method of measuring the depletion fraction of silane when setting the mass spectrometer at the high ionization voltage. The experimental results were compared and accordant with those reported before [1,2,3].
Type of Medium:
Online Resource
ISSN:
0272-9172
,
1946-4274
Language:
English
Publisher:
Springer Science and Business Media LLC
Publication Date:
1993