In:
Materia Japan, Japan Institute of Metals, Vol. 45, No. 12 ( 2006), p. 853-853
Type of Medium:
Online Resource
ISSN:
1340-2625
,
1884-5843
Uniform Title:
Zコントラスト法による化合物半導体ヘテロ界面急峻性評価
DOI:
10.2320/materia.45.853
Language:
English
,
Japanese
Publisher:
Japan Institute of Metals
Publication Date:
2006
detail.hit.zdb_id:
2907148-3