In:
SHINKU, The Vacuum Society of Japan, Vol. 31, No. 9 ( 1988), p. 789-795
Type of Medium:
Online Resource
ISSN:
0559-8516
,
1880-9413
Uniform Title:
P‐CVD法により作製したB‐Si‐N系セラミックス薄膜の諸特性
Language:
Japanese
Publisher:
The Vacuum Society of Japan
Publication Date:
1988
detail.hit.zdb_id:
2397282-8