In:
Acta Optica Sinica, Shanghai Institute of Optics and Fine Mechanics, Vol. 38, No. 5 ( 2018), p. 0505003-
Type of Medium:
Online Resource
ISSN:
0253-2239
Uniform Title:
电子束光刻-近场全息法制作平焦场光栅的误差分析及补偿方法
DOI:
10.3788/AOS/2018/38/5
DOI:
10.3788/AOS201838.0505003
Language:
English
,
Chinese
Publisher:
Shanghai Institute of Optics and Fine Mechanics
Publication Date:
2018