In:
Acta Optica Sinica, Shanghai Institute of Optics and Fine Mechanics, Vol. 42, No. 11 ( 2022), p. 1134003-
Type of Medium:
Online Resource
ISSN:
0253-2239
Uniform Title:
Thin Film Optical Elements in Extreme Ultraviolet and Vacuum Ultraviolet
DOI:
10.3788/AOS/2022/42/11
DOI:
10.3788/AOS202242.1134003
Language:
English
,
Chinese
Publisher:
Shanghai Institute of Optics and Fine Mechanics
Publication Date:
2022