In:
Chinese Optics Letters, Shanghai Institute of Optics and Fine Mechanics, Vol. 6, No. 5 ( 2008), p. 384-385
Type of Medium:
Online Resource
ISSN:
1671-7694
Uniform Title:
溅射制备C膜的内压力分析
DOI:
10.3788/COL/2008/6/5
DOI:
10.3788/COL20080605.0384
Language:
English
,
Chinese
Publisher:
Shanghai Institute of Optics and Fine Mechanics
Publication Date:
2008