In:
Chinese Optics Letters, Shanghai Institute of Optics and Fine Mechanics, Vol. 10, No. 1 ( 2012), p. 013103-13106
Type of Medium:
Online Resource
ISSN:
1671-7694
Uniform Title:
Thinning and polishing of cross-section of depth-graded WSi2/Si multilayer for linear zone plate application
DOI:
10.3788/COL/2012/10/1
DOI:
10.3788/COL201210.013103
Language:
English
,
Chinese
Publisher:
Shanghai Institute of Optics and Fine Mechanics
Publication Date:
2012