In:
Chinese Optics Letters, Shanghai Institute of Optics and Fine Mechanics, Vol. 11, No. 4 ( 2013), p. 041405-41408
Type of Medium:
Online Resource
ISSN:
1671-7694
Uniform Title:
Effects of prism beam expander and slits on excimer laser linewidth narrowing module
DOI:
10.3788/COL/2013/11/4
DOI:
10.3788/COL201311.041405
Language:
English
,
Chinese
Publisher:
Shanghai Institute of Optics and Fine Mechanics
Publication Date:
2013