In:
Chinese Optics Letters, Shanghai Institute of Optics and Fine Mechanics, Vol. 15, No. 7 ( 2017), p. 071402-
Type of Medium:
Online Resource
ISSN:
1671-7694
Uniform Title:
Wavelength calibration of narrowband ArF laser with iron hollow cathode lamp
DOI:
10.3788/COL/2017/15/7
DOI:
10.3788/COL201715.071402
Language:
English
,
Chinese
Publisher:
Shanghai Institute of Optics and Fine Mechanics
Publication Date:
2017