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Micro energy director array for ultrasonic precise sealing of polymer MEMS device

LUO Yi, 罗怡 ; ZHANG Miao-miao, 张苗苗 ; SUN Yi-bo, 孙屹博 ; [et al.]

Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences ; 2011

In: Optics and Precision Engineering Vol. 19, No. 4 ( 2011), p. 754-761

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In: Optics and Precision Engineering, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Vol. 19, No. 4 ( 2011), p. 754-761

Type of Medium: Online Resource

ISSN: 1004-924X

Uniform Title: 面向聚合物微器件超声波精密封接的阵列微导能结构

URL: Issue

URL: Journal

URL: Article

DOI: 10.3788/OPE./2011/19/4

DOI: 10.3788/OPE.

DOI: 10.3788/OPE.20111904.0754

Language: English , Chinese

Publisher: Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences

Publication Date: 2011

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Kooperativer Bibliotheksverbund

Berlin Brandenburg