In:
Optics and Precision Engineering, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Vol. 19, No. 8 ( 2011), p. 1810-1815
Type of Medium:
Online Resource
ISSN:
1004-924X
Uniform Title:
球面旋涂光刻胶工艺
DOI:
10.3788/OPE./2011/19/8
DOI:
10.3788/OPE.20111908.1810
Language:
English
,
Chinese
Publisher:
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences
Publication Date:
2011