In:
Optics and Precision Engineering, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Vol. 20, No. 8 ( 2012), p. 1676-1683
Type of Medium:
Online Resource
ISSN:
1004-924X
Uniform Title:
大尺寸衍射光学元件的扫描离子束刻蚀
DOI:
10.3788/OPE./2012/20/8
DOI:
10.3788/OPE.20122008.1676
Language:
English
,
Chinese
Publisher:
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences
Publication Date:
2012