In:
Optics and Precision Engineering, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Vol. 21, No. 7 ( 2013), p. 1741-1747
Materialart:
Online-Ressource
ISSN:
1004-924X
Originaltitel:
超高真空精密四刀狭缝的结构原理及有限元分析
DOI:
10.3788/OPE./2013/21/7
DOI:
10.3788/OPE.20132107.1741
Sprache:
Englisch
,
Chinesisch
Verlag:
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences
Publikationsdatum:
2013