In:
Optics and Precision Engineering, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Vol. 22, No. 9 ( 2014), p. 2444-2450
Type of Medium:
Online Resource
ISSN:
1004-924X
Uniform Title:
二维零位光栅自动纳米定位系统
DOI:
10.3788/OPE./2014/22/9
DOI:
10.3788/OPE.20142209.2444
Language:
English
,
Chinese
Publisher:
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences
Publication Date:
2014