In:
Optics and Precision Engineering, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Vol. 25, No. 6 ( 2017), p. 1567-1576
Materialart:
Online-Ressource
ISSN:
1004-924X
Originaltitel:
敞开式离子源和微型气泵集成的微型针-柱放电结构芯片设计与实验分析
DOI:
10.3788/OPE./2017/25/6
DOI:
10.3788/OPE.20172506.1567
Sprache:
Englisch
,
Chinesisch
Verlag:
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences
Publikationsdatum:
2017