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Aluminum nitride Lamb wave piezoelectric resonators based on ultrathin silicon substrates

LI Chuan-yu, 李传宇 ; KONG Hui, 孔慧 ; TANG Yu-guo, 唐玉国 ; [et al.]

Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences ; 2018

In: Optics and Precision Engineering Vol. 26, No. 2 ( 2018), p. 371-379

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In: Optics and Precision Engineering, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Vol. 26, No. 2 ( 2018), p. 371-379

Type of Medium: Online Resource

ISSN: 1004-924X

Uniform Title: 超薄硅衬底氮化铝Lamb波压电谐振器

URL: Issue

URL: Journal

URL: Article

DOI: 10.3788/OPE./2018/26/2

DOI: 10.3788/OPE.

DOI: 10.3788/OPE.20182602.0371

Language: English , Chinese

Publisher: Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences

Publication Date: 2018

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Kooperativer Bibliotheksverbund

Berlin Brandenburg