In:
Optics and Precision Engineering, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Vol. 27, No. 1 ( 2019), p. 137-145
Materialart:
Online-Ressource
ISSN:
1004-924X
Originaltitel:
MEMS热电堆芯片固晶工艺参数的优化
DOI:
10.3788/OPE./2019/27/1
DOI:
10.3788/OPE.20192701.0137
Sprache:
Englisch
,
Chinesisch
Verlag:
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences
Publikationsdatum:
2019