In:
Chinese Journal of Liquid Crystals and Displays, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Vol. 29, No. 1 ( 2014), p. 7-14
Type of Medium:
Online Resource
ISSN:
1007-2780
Uniform Title:
大尺寸TFT-LCD ECCP刻蚀工艺低耗整合
DOI:
10.3788/YJYXS/2014/29/1
DOI:
10.3788/YJYXS20142901.0007
Language:
English
,
Chinese
Publisher:
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences
Publication Date:
2014