In:
Chinese Journal of Liquid Crystals and Displays, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Vol. 34, No. 2 ( 2019), p. 119-124
Materialart:
Online-Ressource
ISSN:
1007-2780
Originaltitel:
ECCP干法刻蚀条件下的TFT基板绝缘层过孔腐蚀的改善
DOI:
10.3788/YJYXS/2019/34/2
DOI:
10.3788/YJYXS20193402.0119
Sprache:
Englisch
,
Chinesisch
Verlag:
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences
Publikationsdatum:
2019