In:
Chinese Journal of Liquid Crystals and Displays, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Vol. 34, No. 2 ( 2019), p. 146-154
Type of Medium:
Online Resource
ISSN:
1007-2780
Uniform Title:
光刻制程参数对光刻胶DICD和锥角的影响
DOI:
10.3788/YJYXS/2019/34/2
DOI:
10.3788/YJYXS20193402.0146
Language:
English
,
Chinese
Publisher:
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences
Publication Date:
2019