In:
Chinese Journal of Luminescence, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Vol. 39, No. 2 ( 2018), p. 214-219
Type of Medium:
Online Resource
ISSN:
1000-7032
Uniform Title:
旋涂法制备氧化锆介质层及其在薄膜晶体管中的应用
DOI:
10.3788/fgxb/2018/39/2
DOI:
10.3788/fgxb20183902.0214
Language:
English
,
Chinese
Publisher:
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences
Publication Date:
2018