In:
ACTA PHOTONICA SINICA, Shanghai Institute of Optics and Fine Mechanics, Vol. 50, No. 5 ( 2021), p. 86-
Materialart:
Online-Ressource
ISSN:
1004-4213
Originaltitel:
Critical Coupling Condition and Preparation Technology of Aluminum Nitride Microring Resonator
DOI:
10.3788/gzxb/2021/50/5
DOI:
10.3788/gzxb20215005.0514003
Sprache:
Englisch
,
Chinesisch
Verlag:
Shanghai Institute of Optics and Fine Mechanics
Publikationsdatum:
2021