In:
Advanced Materials Research, Trans Tech Publications, Ltd., Vol. 557-559 ( 2012-7), p. 1322-1325
Abstract:
A novel femtosecond laser directly writing method was utilized to fabricate microchannels on silicon carbide (SiC) substrate. The micro patterns were transferred to a Polydimethylsiloxane (PDMS) stamp, characterized by both optical microscope and scanning electron microscope (SEM). The relationship between size (depth and width) of channels and power of laser pulse were discussed in detail.
Type of Medium:
Online Resource
ISSN:
1662-8985
DOI:
10.4028/www.scientific.net/AMR.557-559
DOI:
10.4028/www.scientific.net/AMR.557-559.1322
Language:
Unknown
Publisher:
Trans Tech Publications, Ltd.
Publication Date:
2012
detail.hit.zdb_id:
2265002-7