In:
Key Engineering Materials, Trans Tech Publications, Ltd., Vol. 315-316 ( 2006-7), p. 646-650
Abstract:
The synthesis of nanocrystalline diamond film on polycrystalline molybdenum substrates
was carried out by using of self-made hot filament chemical vapor deposited (HFCVD) system. Positive bias voltage on the grid electrode on top of hot filaments and negative bias voltage on the
substrate were applied. High purity and extremely smooth nanocrystalline diamond films were successfully prepared by using the double bias method. Raman, SEM, XRD and AFM results show
that the diamond films obtained have grain sizes less than 20nm, nucleation density higher than 1011cm-1. The mechanism of double bias is also discussed in this paper. The positive grid bias
increases the active, decomposition and ionization of hydrogen and methane molecules, while negative substrate bias helps positive carbon-containing ions bombard the substrate that leads to the
high nucleation density of the diamond film.
Type of Medium:
Online Resource
ISSN:
1662-9795
DOI:
10.4028/www.scientific.net/KEM.315-316
DOI:
10.4028/www.scientific.net/KEM.315-316.646
Language:
Unknown
Publisher:
Trans Tech Publications, Ltd.
Publication Date:
2006
detail.hit.zdb_id:
2073306-9
