In:
Materials Science Forum, Trans Tech Publications, Ltd., Vol. 475-479 ( 2005-1), p. 3631-3634
Abstract:
DLC and nanocrystalline diamond films were prepared by PLD process using 308
nm(XeCl) laser beam with high power(200-500 W) and high frequency(200-500 Hz). The effects of some parameters such as the laser power density, the repetition rate on the structures and characters of the DLC films under such extreme power and repetition rate conditions were studied for the first time. The results indicated that: (1) The microstructures of the films were varied from amorphous to nanocrystalline with the laser power density increased from 108 W/cm2 to 1010 W/cm2; (2) The properties of the films grew at 200 Hz and 300 Hz were better than that of the films grew at 500 Hz, with the laser power density remained constant at 1010 W/cm2.
Type of Medium:
Online Resource
ISSN:
1662-9752
DOI:
10.4028/www.scientific.net/MSF.475-479
DOI:
10.4028/www.scientific.net/MSF.475-479.3631
Language:
Unknown
Publisher:
Trans Tech Publications, Ltd.
Publication Date:
2005
detail.hit.zdb_id:
2047372-2