In:
Solid State Phenomena, Trans Tech Publications, Ltd., Vol. 281 ( 2018-8), p. 534-539
Kurzfassung:
Generally, bias voltage exercises a great influence on micro-properties (morphology, preferred orientation, mechanical properties, and so on) of the coatings in the process of coating deposited. In order to more systematically explore the influence of bias voltage on microstructure, hardness and adhesion of TiN coatings, TiN coatings were deposited successfully on the surface of 316 stainless steel by high power pulsed magnetron sputtering (HPPMS). A field emission scanning electron microscopy equipped with energy dispersive spectrometer (FESEM/EDS) and an X-ray diffractometer were employed to analyze the surface morphology, chemical composition and phase structure of coatings, respectively. And a nanoindentation and scratch tester was used to investigate the hardness, elastic modulus and adhesion of TiN coatings. Results showed that bias voltage has a great influence on surface morphology of TiN coatings. Moreover, bias voltage can promote preferential orientation and the phase in TiN coating is mainly TiN with a small amount of Ti 2 N. The influence of bias voltage on the hardness and modulus of TiN coating is not obvious, however, the binding force increases fast first and then decreases slow with the increase of bias voltage. TiN coating has excellent performance when bias voltage is-100V.
Materialart:
Online-Ressource
ISSN:
1662-9779
DOI:
10.4028/www.scientific.net/SSP.281
DOI:
10.4028/www.scientific.net/SSP.281.534
Sprache:
Unbekannt
Verlag:
Trans Tech Publications, Ltd.
Publikationsdatum:
2018
ZDB Id:
2051138-3
