In:
Journal of the Korean Institute of Electrical and Electronic Material Engineers, The Korean Institute of Electrical and Electronic Material Engineers, Vol. 29, No. 1 ( 2016-01-01), p. 30-34
Type of Medium:
Online Resource
ISSN:
1226-7945
Uniform Title:
N-polar면의 선택적 에칭 방법을 통한 Free-standing GaN 기판의 Bowing 제어
DOI:
10.4313/JKEM.2016.29.1.30
Language:
English
Publisher:
The Korean Institute of Electrical and Electronic Material Engineers
Publication Date:
2016