In:
Journal of the Korean Society for Aeronautical & Space Sciences, The Korean Society for Aeronautical & Space Sciences, Vol. 31, No. 10 ( 2003-12-01), p. 73-78
Type of Medium:
Online Resource
ISSN:
1225-1348
Uniform Title:
이온 주입에 의한 다결정 실리콘의 응력 구배 완화 및 물성 개선
DOI:
10.5139/JKSAS.2003.31.10.073
Language:
English
Publisher:
The Korean Society for Aeronautical & Space Sciences
Publication Date:
2003