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The Change of Self-heating according to Bottom Oxide and Package which are based on 3㎚ Multi-nanosheet Field Effect Transistor

Yoo, Changhyun ; Kim, Hyunwoo ; Seon, Yoongeun ; [et al.]

The Institute of Electronics Engineers of Korea ; 2021

In: Journal of the Institute of Electronics and Information Engineers Vol. 58, No. 4 ( 2021-04-30), p. 9-17

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In: Journal of the Institute of Electronics and Information Engineers, The Institute of Electronics Engineers of Korea, Vol. 58, No. 4 ( 2021-04-30), p. 9-17

Type of Medium: Online Resource

ISSN: 2287-5026

Uniform Title: 3㎚급 Multi-Nanosheet Field Effect Transistor의 Bottom Oxide 및 Package에 따른 Self-Heating 변화

URL: Article

DOI: 10.5573/ieie.2021.58.4.9

Language: English

Publisher: The Institute of Electronics Engineers of Korea

Publication Date: 2021

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Kooperativer Bibliotheksverbund

Berlin Brandenburg